High-precision Model NEXIV VMZ-H3030

Highest precision of the NEXIV series

Achieves measurement at the highest precision of the NEXIV series, as well as advanced usability and performance. VMZ-H3030 incorporates the features of the up-to-date technologies of the Nikon VMZ-R series to achieve high accuracy and throughput with excellent ease of use. Suitable for applications requiring strict quality control through highly precise measurement.

NEXIV model with the highest precision

5 types of optical zoom systems

Zooming head

Optical magnification

Applications

Type 1

0.5X – 7.5X

High end Molds, mechanical parts, Watchmaking, MedTech, PCB, electronic parts, ceramic parts

Type 2

1X – 15X

Type 3

2X – 30X

High end Electronic parts

Type 4

4X – 60X

High density package substrate (line width, height)

Type TZ

1X – 120X

High end Wafer pattern (WLP, bump height, rewiring mask, MEMS mask)

Specifications

Strokes (X,Y,Z)

300 x 300 x 150 mm

Minimum readout

0.01 μm

Maximum sample weight

30 kg (Accuracy guaranteed: 10 kg)

Maximum permissible error
(for samples under 20 kg)

EUX,MPE, EUY,MPE: 0.6 + 2L / 1000 μm
EUXY,MPE: 0.9+3L / 1000 μm
EUZ,MPE: 0.9+L / 150 μm

Accuracy guaranteed temperature

20°C ± 0.5 K

Maximum driving speed XY, Z

100 mm/s, 50 mm/s

Minimum driving speed XY, Z

0.01 mm/s, 0.001 mm/s

Camera

1/3“ Black and White CCD, 1/3“ Color CCD

• *Color camera option is available only with Type 1, 2 and 3

Working distance

Type 1, 2, 3: 50 mm (10 mm when using 75 degree LED illumination) / Type 4: 30 mm
Type TZ: 31 mm (low magnification), 11 mm (high magnification)

Magnification and FOV

Type 1: 0.5-7.5x/9.33 x 7.01-0.622 x 0.467 mm
Type 2: 1-15x/4.67 x 3.5-0.311 x 0.233 mm
Type 3: 2-30x/2.33 x 1.75-0.155 x 0.117 mm
Type 4: 4-60x / 1.165 x 0.875-0.078 x 0.058 mm
Type TZ: 1-120x/4.67 x 3.5-0.039 x 0.029 mm

Autofocus

Vision AF, Laser AF

Illumination

Type 1, 2, 3, and 4 Episcopic, diascopic, and 8-segment ring with 3 angles
*All white LED/Type 4 has only 1 angle
Type TZ: Episcopic, diascopic, darkfield

Power source

AC 100 - 240 V ± 10% 50/60 Hz

Power consumption

5 A - 2.5 A

Dimensions (W x D x H) & weight

Main body with table: 1000 x 1125 x 1750 mm / approx. 500 kg
Controller: 190 x 450 x 440 mm / approx. 15 kg

Footprint (W x D)

3000×2800 mm