NEXIV Confocal Series VMZ-K3040 and VMZ-K6555 3D
NEXIV Confocal Series VMZ-K3040 and VMZ-K6555 3D: FOV Mesurements Generated with confocal images:
A ground-breaking multifunctional video measuring system developed on the strength of Nikon’s leading optomechatronics technology.
Incorporates confocal technology, brightfield with a 15X zoom, and Laser AF. No matter what geometrical measurements are needed, two-dimensional or three-dimensional, inspection and evaluation is exceptionally fast and accurate.
The Confocal NEXIV can be optimally used for measurements of a variety of bump heights on advanced IC packages, such as wafer-level CSP, as well as for the inspection of highly complicated structures of MEMS and probe card.
Features
- Simultaneous wide-area height measurements with Nikon proprietary confocal optics
- 2D measurement with 15x brightfield zoom optics
- Fully compatible with 300 mm wafer measurement at semiconductor fabs
Applications
- IC Packages
o Flip Chip/COF(Bump)/COG
o CSP (FBGA)/SIP (Bump, Wire)
o Interposer (Pad height)
- MEMS
- Probe Card (Silicon Probe, Au Probe)
- Precise Glass Components (Micro Lens, Contact Lens)
- Photo Spacer Width/Height for Color Filter for FPD Panel
VMZ-K6055:
Objective lens | |||||
Magnification | 3x | 7.5x | 15x | 30x | |
Working Distace | 24 mm | 5 mm | 20 mm | 5 mm | |
Confocal optics (area height measure) | |||||
Field of view | 4 x 3 mm | 1.6 x 1.2 mm | 0.8 x 0.6 mm | 0.4 x 0.3 mm | |
Height measurement repeatability (2σ) | 0.35 μm | 0.25 μm | 0.25 μm | 0.20 μm | |
Height measurement resolution | 0.01 μm | ||||
Brightfield optics (2D measurement) | |||||
Zooming method | Motorized 5-step zoom | ||||
Field of view | 4 x 3mm to 0.27 x 0.2 mm | 1.6 x 1.2mm to 0.11 x 0.08 mm | 1.26 x 0.95mm to 0.1 x 0.074 mm | 0.63 x 0.47mm to 0.05 x 0.04 mm | |
Illumination | White LED | ||||
Autofocus | Vision AF, Laser AF | ||||
Main body | |||||
Stroke (X, Y, Z) | 300 x 400 x 150 mm | ||||
Accuracy guaranteed loading capacity | 30 kg | ||||
Maximum permissible error | EUX,MPE EUY,MPE | 1.5 + 4L/1000μm | |||
EUXY,MPE | 2.5 + 4L/1000μm | ||||
EUZ,MPE | 1 + L/1000μm | ||||
Main unit weight | 830kg | ||||
Power source/power consumption | AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A | ||||
Operating condition | Temperature: 20°C ± 0.5K, Humidity: 70% or less | ||||
Acquired standard | CE marking (low voltage/EMC/laser) | ||||
Footprint | 2500 x 190 0mm |
VMZ-K3040:
Objective lens | |||||
Magnification | 3x | 7.5x | 15x | 30x | |
Working Distance | 24 mm | 5 mm | 20 mm | 5 mm | |
Confocal optics (area height measure) | |||||
Field of view | 4 x 3 mm | 1.6 x 1.2 mm | 0.8 x 0.6 mm | 0.4 x 0.3 mm | |
Height measurement repeatability (2σ) | 0.35 μm | 0.25 μm | 0.25 μm | 0.20 μm | |
Height measurement resolution | 0.01 μm | ||||
Brightfield optics (2D measurement) | |||||
Zooming method | Motorized 5-step zoom | ||||
Field of view | 4 x 3mm to 0.27 x 0.2 mm | 1.6 x 1.2mm to 0.11 x 0.08 mm | 1.26 x 0.95mm to 0.1 x 0.074 mm | 0.63 x 0.47mm to 0.05 x 0.04 mm | |
Illumination | White LED | ||||
Autofocus | Vision AF, Laser AF | ||||
Main body | |||||
Stroke (X, Y, Z) | 300 x 400 x 150 mm | ||||
Accuracty guaranteed loading capacity | 20 kg | ||||
Maximum permissible error | EUX,MPE EUY,MPE | 1.5 + 4L/1000 μm | |||
EUXY,MPE | 2.5 + 4L/1000 μm | ||||
EUZ,MPE | 1 + L/1000 μm | ||||
Main unit weight | 850 kg | ||||
Power source/power consumption | AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A | ||||
Operating condition | Temperature: 20°C ± 0.5K, Humidity: 70% or less | ||||
Acquired standard | CE marking (low voltage/EMC/laser) | ||||
Footprint | 2500 x 1600 mm |