NEXIV Confocal Series VMZ-K3040 and VMZ-K6555 3D

NEXIV Confocal Series VMZ-K3040 and VMZ-K6555 3D: FOV Mesurements Generated with confocal images:

A ground-breaking multifunctional video measuring system developed on the strength of Nikon’s leading optomechatronics technology.

Incorporates confocal technology, brightfield with a 15X zoom, and Laser AF. No matter what geometrical measurements are needed, two-dimensional or three-dimensional, inspection and evaluation is exceptionally fast and accurate.

The Confocal NEXIV can be optimally used for measurements of a variety of bump heights on advanced IC packages, such as wafer-level CSP, as well as for the inspection of highly complicated structures of MEMS and probe card.

Features

Simultaneous wide-area height measurements with Nikon proprietary confocal optics
2D measurement with 15x brightfield zoom optics
Fully compatible with 300 mm wafer measurement at semiconductor fabs

Applications

IC Packages

o Flip Chip/COF(Bump)/COG

o CSP (FBGA)/SIP (Bump, Wire)

o Interposer (Pad height)

MEMS
Probe Card (Silicon Probe, Au Probe)
Precise Glass Components (Micro Lens, Contact Lens)
Photo Spacer Width/Height for Color Filter for FPD Panel

VMZ-K6055:

Objective lens
Magnification		3x	7.5x	15x	30x
Working Distace		24 mm	5 mm	20 mm	5 mm
Confocal optics (area height measure)
Field of view		4 x 3 mm	1.6 x 1.2 mm	0.8 x 0.6 mm	0.4 x 0.3 mm
Height measurement repeatability (2σ)		0.35 μm	0.25 μm	0.25 μm	0.20 μm
Height measurement resolution		0.01 μm
Brightfield optics (2D measurement)
Zooming method		Motorized 5-step zoom
Field of view		4 x 3mm to 0.27 x 0.2 mm	1.6 x 1.2mm to 0.11 x 0.08 mm	1.26 x 0.95mm to 0.1 x 0.074 mm	0.63 x 0.47mm to 0.05 x 0.04 mm
Illumination		White LED
Autofocus		Vision AF, Laser AF
Main body
Stroke (X, Y, Z)		300 x 400 x 150 mm
Accuracy guaranteed loading capacity		30 kg
Maximum permissible error	E_UX,MPE E_UY,MPE	1.5 + 4L/1000μm
	E_UXY,MPE	2.5 + 4L/1000μm
	E_UZ,MPE	1 + L/1000μm
Main unit weight		830kg
Power source/power consumption		AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition		Temperature: 20°C ± 0.5K, Humidity: 70% or less
Acquired standard		CE marking (low voltage/EMC/laser)
Footprint		2500 x 190 0mm

VMZ-K3040:

Objective lens
Magnification		3x	7.5x	15x	30x
Working Distance		24 mm	5 mm	20 mm	5 mm
Confocal optics (area height measure)
Field of view		4 x 3 mm	1.6 x 1.2 mm	0.8 x 0.6 mm	0.4 x 0.3 mm
Height measurement repeatability (2σ)		0.35 μm	0.25 μm	0.25 μm	0.20 μm
Height measurement resolution		0.01 μm
Brightfield optics (2D measurement)
Zooming method		Motorized 5-step zoom
Field of view		4 x 3mm to 0.27 x 0.2 mm	1.6 x 1.2mm to 0.11 x 0.08 mm	1.26 x 0.95mm to 0.1 x 0.074 mm	0.63 x 0.47mm to 0.05 x 0.04 mm
Illumination		White LED
Autofocus		Vision AF, Laser AF
Main body
Stroke (X, Y, Z)		300 x 400 x 150 mm
Accuracty guaranteed loading capacity		20 kg
Maximum permissible error	E_UX,MPE E_UY,MPE	1.5 + 4L/1000 μm
	E_UXY,MPE	2.5 + 4L/1000 μm
	E_UZ,MPE	1 + L/1000 μm
Main unit weight		850 kg
Power source/power consumption		AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition		Temperature: 20°C ± 0.5K, Humidity: 70% or less
Acquired standard		CE marking (low voltage/EMC/laser)
Footprint		2500 x 1600 mm